(IT-NEWSWIRE.COM, February 13, 2018 ) Nanoelectromechanical Systems-Global Market Status and Trend Report 2013-2023 offers a comprehensive analysis on Nanoelectromechanical Systems industry, standing on the readers perspective, delivering detailed market data and penetrating insights. No matter t
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Uses include accelerometers, or detectors of chemical substances in the air. As noted by Richard Feynman in his famous talk in 1959, "Theres Plenty of Room at the Bottom," there are many potential applications of machines at smaller and smaller sizes; by building and controlling devices at smaller scales, all ...
A drive circuit for and method of driving a piezoelectric actuator utilizes an impedance coupled to the piezoelectric actuator, wherein the impedance and the piezoelectric actuator together form a tank circuit that has a resonant frequency. A first circuit is provided that drives the actuator at the resonant frequency and a second circuit is further provided that selectively operates the first circuit in one of at least two modes of operation including a first mode that causes the actuator to be energized at a first duty cycle and a second mode that causes the actuator to be energized at a second duty cycle.
Carbon nanotubes and graphene have many interesting properties. To exploit the properties in applications their synthesis and incorporation in devices has to be understood and controlled. This thesis is based on experimental studies on synthesis of carbon nanotubes and fabrication of nanoelectromechanical systems from carbon nanotubes and graphene. Vertically aligned nanotube arrays with heights over 800 µm have been grown using acetylene with iron as catalyst on alumina support using thermal chemical vapor deposition. By varying the partial pressure of acetylene it was found that the addition-rate of carbon was proportional to the coverage of acetylene molecules on the catalyst nanoparticle. In certain conditions the macroscopic pattern of the catalyst areas influenced the microscopic properties of the carbon nanotubes. It was shown that the initial carbon-precursor flow conditions could determine the number of walls produced. The amount of carbon incorporated into nanotubes was constant but ...
Acreo is a well reputable MEMS design house, contracted by leading MEMS manufacturers, that offer custom MEMS design of sensors and actuators, including electronics, test and calibration routines for production. We are especially well known for our work on inertial MEMS sensors (gyros and accelerometers). Micro-Electro-Mechanical Systems, or MEMS, is a technology that allows microfabrication of miniaturized mechanical and electro-mechanical elements i.e., devices and structures. Using MEMS, a vast number of microsensors have been demonstrated with performances exceeding those of their macroscale counterparts; temperature, pressure, inertial forces, chemical species, magnetic fields, radiation, etc. MEMS technology has become a standard tool for building microsensors for navigation and motion tracking based on inertial phenomena; RF micro switch; interdigital electrodes for various bio-chemical measurements; bio-array reaction vessel that can be sealed with magnetic particles, packaging and assembly of
For measuring angular rate, numerous types of gyroscopes have been realized over the past years using MEMS technology, where current state-of-the-art MEMS gyroscopes show formidable performance in range, resolution and noise floor [12-15]. MEMS gyroscopes are typically no haltere-based systems, are generally heavily underdamped2 and operate at rather high frequencies. By contrast, the flys haltere system is a close to critically damped system and operates around the flys wing beat frequency (130-150 Hz) [9]. Obviously, the flys haltere system has developed under evolutionary pressure and therefore addresses the sensory needs of the fly. As a result, not only the operation principle is different from those generally used in MEMS gyroscopes, but also the performance may score high on metrics other than generally used for MEMS gyroscopes. For example, bandwidth and response time may be far more essential for flies than (bias-)stability and noise floor, as the halteres have been proven to aid in ...
received the B.S. and M.S. degrees (with high honors) in electrical and electronics engineering from Middle East Technical University (METU), Ankara, Turkey, in 2010 and 2012, respectively. He is currently working toward the Ph.D. degree in electrical and computer engineering at the University of California at Davis, Davis, CA, USA. He was a Research Assistant with the Micro-Electro-Mechanical Systems Research and Applications Center, METU, between 2010 and 2013. He has been a Graduate Research Assistant with the University of California at Davis since 2013. His research interests include MEMS sensors and analog integrated circuits.. An Ultrasonic Implantable for Continuous In Vivo Monitoring of Tissue Oxygenation [BPN871] ...
Caltech researchers are working on developing a MEMS-based (Micro-Electro-Mechanical System) brain-computer interface, with initial designs proving promisi
Microelectromechanical systems manufacturers, exporters, companies, sellers, OEM suppliers directory. Find the best Microelectromechanical systems business partners & shopping resources from this electronics & computer products portal. (Microelectronics : Microelectromechanical systems)
Abstract:. Despite of decades of research in conventional drug delivery systems many challenges are unconfronted in treatment of chronic diseases at a personalized medicine level. So there is a need for development of targeted and efficient drug delivery systems at such levels of treatment. Microelectromechanical systems have some unique characteristics like analyte sensitivity, electrical responsiveness, temporal control and sizes similar to cells and organelles that has led to engineering of implants for drug delivery in various chronic diseases.Targeting can be achieved through the use of this technology as the drugs are released at the site of action as well as in minimal effective concentrations, thus avoiding side-effects also. This review gives a general overview about the Bio Microelectromechanical systems used in targeting with some relevant examples. Hence Microelectromechanical systems prove to be a promising contender for development of drug delivery systems and targeting in ...
Many surveying engineering applications require the knowledge of the orientation parameters of instruments. One can use inertial measurement units (IMUs) to determine that. IMUs are combinations of several inertial sensors and comprise at least an accelerometer and a gyroscope. Therefore, they can detect accelerations and angular rates in a three-dimensional space. As micro-electro-mechanical systems, the sensors are increasingly getting smaller and lighter, but without being reduced in their accuracy. The smaller size facilitates diverse placing of the sensors, which allows a variety of uses. Moreover, several low-cost IMUs have been devised since the development of single-board computers.. The main objectives of this work are to determine tilts using a low-cost IMU, and the accuracy of the sensor. Furthermore, it studies general IMU applications in surveying engineering, and examines whether low-cost versions are applicable.. To fulfil the objectives, the study was based on a selected low-cost ...
TY - JOUR. T1 - Black phosphorus nanoelectromechanical resonators vibrating at very high frequencies. AU - Wang, Zenghui. AU - Jia, Hao. AU - Zheng, Xuqian. AU - Yang, Rui. AU - Wang, Zefang. AU - Ye, G. J.. AU - Chen, X. H.. AU - Shan, Jie. AU - Feng, Philip X.L.. PY - 2015/1/21. Y1 - 2015/1/21. N2 - We report on the experimental demonstration of a new type of nanoelectromechanical resonator based on black phosphorus crystals. Facilitated by a highly efficient dry transfer technique, crystalline black phosphorus flakes are harnessed to enable drumhead resonators vibrating at high and very high frequencies (HF and VHF bands, up to ∼100 MHz). We investigate the resonant vibrational responses from the black phosphorus crystals by devising both electrical and optical excitation schemes, in addition to measuring the undriven thermomechanical motions in these suspended nanostructures. Flakes with thicknesses from ∼200 nm down to ∼20 nm clearly exhibit elastic characteristics transitioning from ...
The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si x N y /Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.
We report a MEMS (Micro-Electro-Mechanical Systems)-based microbial fuel cell (MFC) that produces a high power density. The MFC features 4.5-μL anode/cathode chambers defined by 20-μm-thick photo-definable polydimethylsiloxane (PDMS) films. The MFC uses a Geobacter-enriched mixed bacterial culture, anode-res
Surface micromachining of micro-electro-mechanical systems (MEMS) has inherent limitations that can lead to mechanisms having an undesirable amount of clearance in revolute and prismatic joints. In micro devices, where actua-tion of the mechanisms is often limited by the displacement capabilities of actuators, the effects of joint clearances become significant. This paper details a modeling technique that is suited to the particular sources of clearance found in surface-micromachined mechanisms. Clearance vector models are used where the clearances are represented as vectors having variable lengths and directions. The preci-sion error of any point on any rigid link can be determined, in addition to the error in link angles, by comparison with the ideal (zero clearance) model. A bistable compliant mechanism is used as an example.
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS ...
Linde Electronics, the global electronics business of The Linde Group, has strengthened its material support for electronics manufacturing by announcing a strategic partnership with Pelchem, the global fluorochemicals specialist, to accelerate the development of Micro-Electro-Mechanical Systems (MEMS).
The investigators are studying motivational interviewing (MI). MI is a counseling method to help people adopt healthy behaviors. The investigators will test whether MI improves patients accurate use of glaucoma eye drops. The investigators will train eye clinic staff called glaucoma educators to use MI. Up to 250 patients at 3 clinics will be recruited. All patients will receive their usual eye care. Based on chance, some patients will also be supported by a glaucoma educator. The groups will be compared on medication adherence using micro-electro-mechanical system(MEMS). MEMS are electronic bottle caps that track when a medication bottle is opened. Patients will be aware that their medication use is tracked. The groups will also be compared on treatment value, outcomes, and cost. The investigators will also collect data on variables that may predict medication adherence ...
All participants will continue to take the anti-HIV medication regimen prescribed by their health care provider. However, participants will be asked to keep one medication type in a bottle that has a special Micro-Electro-Mechanical System (MEMS) cap. This electronic cap will record each time the participant opens the bottle. Participants will meet with study staff for MEMS cap data collection once weekly for the first 4 weeks, every 2 weeks up to Week 12, and then every 4 weeks thereafter.. EC will consist of 30- to 45-minute counseling sessions about medication adherence. Participants will meet in person with a counselor for the first five sessions, occurring at baseline and Weeks, 1, 2, 6, and 11. An additional five counseling sessions will be conducted by phone during Weeks 4, 9, 15, 19, and 23. Participants receiving mDOT will have their doses of HIV medication delivered to them by an mDOT worker for the first 24 weeks of treatment. Participants will select a time and location to meet with ...
The growing research in the applications of magnetically patterned thin film permanent magnets (PM) for lab-on-chip micromanipulation of various microscopic objects and for micro-electro-mechanical systems (MEMS) increases the demand for characterization of the magnetic space field distribution produced by such PMs. In the present work calculations are made for different patterns and magnetization distributions of Nd-Fe-B anisotropic films deposited onto 100 mm Si substrates using high rate triode sputtering. Space resolved magnetic imaging techniques utilizing magneto-optical indicator films (MOIF) were applied for the visualization of the magnetic field microdistribution with a resolution of the order of 1 micrometer. Both uniaxial and planar MOIF calibrated with the aid of a known external field were used to achieve quantitative measurements. Deviation of the data measured for real samples from the results of calculations performed for the idealized case of a uniform material are revealed. ...
Microfluidics is generally used to describe any technology that moves microscopic and nano-scale quantities of fluid through channels on a MEMS (Micro-Electro-Mechanical System). Devices in this realm are expected to have the capabilities to accurately…. ...
Associate Professor Reza Ghodssi (ECE/ISR) has been named as an associate editor for the Journal of Biomedical Microdevices, effective May 1, 2008. Ghodssi is also affiliated with the Fischell Department of Bioengineering. Biomedical Microdevices is the first journal to focus on biomedical applications of micro- and nanotechnology. It covers research in the diagnostic and therapeutic applications of Micro-Electro-Mechanical Systems, microfabrication, and nanotechnology. Topics include design, characterization, testing, modeling and clinical validation of microfabricated systems, and their integration on-chip and in larger functional units. The interests of the journal include systems for neural stimulation and recording; bioseparation technologies such as nanofilters and electrophoretic equipment; miniaturized analytic and DNA identification systems; biosensors; microtechnologies for cell and tissue research; tissue engineering; cell transplantation and the controlled release of drugs and ...
This study presents an effort to explore the exploitation of dynamic instabilities and bifurcations in micro-electro-mechanical systems to realize novel methods and functionalities for mass sensing and detection. These instabilities are induced by exciting a microstructure with a nonlinear forcing composed of a dc parallel-plate electrostatic load and an ac harmonic load. The frequency of the ac load is tuned to be near the fundamental natural frequency of the structure (primary resonance) or its multiples (subharmonic resonance). For each excitation method, local bifurcations, such as saddle-node and pitchfork, and global bifurcations, such as the escape phenomenon, may occur. This work aims to explore the utilization of these bifurcations to design novel mass sensors and switches of improved characteristics. One explored concept of a device is a switch triggered by mass threshold. The basic idea of this device is based on the phenomenon of escape from a potential well. This device has the ...
Control of biomolecular transport is essential to the advancement of nanokinematic systems whether for molecular cargo delivery in sensing or assembly processes, or as a means to interface micro-electro-mechanical systems with the nanoscale regime. Actin-myosin and nanotubule-kinesin systems represent two protein-based systems being explored as basic building blocks for realization of linear and rotary biomolecular motors based on biological nanoscale transport phenomena. While macroscopic electro-motility assays have been documented in the literature, harnessing this biological nanokinematic system to achieve spatially addressable transport of cargo on the micrometer scales of an integrated chip surface is of significant interest. In this work, we undertake a fundamental exploration of the interaction of microscale localized electric fields with the nanoscale actin-myosin motility assay. Electric fields established with arrays of integrated electrode structures under the assayed surface are used to
The microvascular network is a simple but critical system that is responsible for various important biological mechanisms in the bodies of all animals. The ability to generate a functional microvessel in vitro not only makes it possible to engineer vital tissue of considerable size but also serves as a platform for biomedical studies. In this study, we propose a simple method for fabricating customized cylinder micro-scaffolds for the in vitro development of microvascular networks. By integrating micro-electro-mechanical systems techniques with thermal reflow, we design and fabricate a micro-scale hemi-cylinder photoresist template. Then, a replica mold of polydimethylsiloxane, produced by casting, is used to generate microvascular network scaffolds of poly(lactide-co-glycolide) (PLGA). We selected the human umbilical vein endothelial cell (HUVEC) as our model endothelial cell, seeded it onto both sides of the PLGA scaffold, and cultured it using a traditional approach with no pumping system. ...
REMOTE-CONTROLLED insects may sound like the stuff of science fiction, but they have already been under development for some time now. In 2006, for example, the Defense Advanced Research Projects Agency (DARPA, the Pentagons research and development branch) launched the Hybrid Insect Micro-Electro-Mechanical Systems program, whose ultimate aim is to turn insects into unmanned aerial…. ...
This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology. The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz, and measurement over the full ±1 g dynamic range (1 g = 9.81 ms−2). The sensitivity of the device is demonstrated through the tracking of Earth tides and recording of ground motion corresponding to a number of teleseismic events over several months. These results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of stability and resolution with wider implications for precision measurement employing other resonant-output MEMS devices such as gyroscopes and magnetometers.
A microelectromechanical systems (MEMS) device utilizing an aluminum fluoride layer as an etch stop is disclosed. In one embodiment, a MEMS device includes a first electrode having a first surface; and a second electrode having a second surface facing the first surface and defining a gap therebetween. The second electrode is movable in the gap between a first position and a second position. At least one of the electrodes includes an aluminum fluoride layer facing the other of the electrodes. During fabrication of the MEMS device, a sacrificial layer is formed between the first and second electrodes and is released to define the gap. The aluminum fluoride layer serves as an etch stop to protect the first or second electrode during the release of the sacrificial layer.
We report on the experimental demonstration of a new type of nanoelectromechanical resonator based on black phosphorus crystals. Facilitated by a highly efficient dry transfer technique, crystalline black phosphorus flakes are harnessed to enable drumhead resonators vibrating at high and very high frequencie Editors Choice: Making sense of nanosensors and devices
0061] Referring to FIGS. 14A and 14B, a nanoelectromechanical device 1202 is shown according to an exemplary embodiment. The device 1202 includes a plurality of contacts 1232, shown as first through third contacts 1232a-1232c, spaced along the length of a surface 1228 and at least one variable actuator 1230 configured to deflect the nanotube 1210 into contact with the surface 1228 along a variable length thereby making 0, 1, 2 . . . n connections. The nanotube 1210 is supported at a first end 1212 by a first support structure 1220. As shown in the embodiment of FIG. 14A, the actuator 1230 is configured to apply a variable force on the nanotube 1210, thereby causing the nanotube 1210 to couple to the surface 1228. A low force is shown to cause the nanotube 1210 to buckle at a first buckling location 1218a and to couple to a first contact 1232a. A high force (shown in dashed lines) causes the nanotube 1210 to buckle at a second buckling location 1218b and to also couple to a second contact 1232b. ...
Nanoelectromechanical (NEM) memory cells are provided by anchoring a conductive nanometer-scale beam (e.g., a nanotube) to a base and allowing a portion of the beam to move. A charge containment layer is provided in the vicinity of this free-moving portion. To read if a charge is stored in the charge containment layer, a charge is formed on the beam. If a charge is stored then forces between the charged beam and the charge containment layer will displace the free-moving portion of the beam. This movement may be sensed by a sense contact. Alternatively, the beam may contact a sense contact at an ambient frequency when no charge is stored. Changing the amount of charge stored may change this contact rate. The contract rate may be sensed to determine the amount of stored charge.
We present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers. ...
Gas permeability through damage networks in composite laminates is the key issue for the applicability of high-performance composites to the cryogenic propellant tanks of space launch vehicles. A simple model for the gas permeability induced by multilayer matrix cracks in composite laminates is proposed based on the leak conductance at crack intersections, which is an extension of the model by Kumazawa et al (AIAA J. 41, 2037-2044, 2003). Experimental evidence on the gas permeability mechanisms is summarized and reflected in the present model. In order to include the effects of applied loadings and damage sizes on the gas permeability, the leak conductance is assumed to be a function of the average crack opening displacements of the matrix cracks and the crack intersection angles. The leak conductance factor was empirically obtained as a function of the crack intersection angle, and the comparison of the gas permeability between the predictions based on the developed model and the experimental results
The piezoresistive effect is a change in the electrical resistivity of a semiconductor or metal when mechanical strain is applied. In contrast to the piezoelectric effect, the piezoresistive effect causes a change only in electrical resistance, not in electric potential. The change of electrical resistance in metal devices due to an applied mechanical load was first discovered in 1856 by Lord Kelvin. With single crystal silicon becoming the material of choice for the design of analog and digital circuits, the large piezoresistive effect in silicon and germanium was first discovered in 1954 (Smith 1954). In conducting and semi-conducting materials, changes in inter-atomic spacing resulting from strain affect the bandgaps, making it easier (or harder depending on the material and strain) for electrons to be raised into the conduction band. This results in a change in resistivity of the material. Within a certain range of strain this relationship is linear, so that the piezoresistive coefficient ρ ...
In this late-start Tier I Seniors Council sponsored LDRD, we have designed, simulated, microfabricated, packaged, and tested ion traps to extend the current quantum simulation capabilities of macro-ion traps to tens of ions in one and two dimensions in monolithically microfabricated micrometer-scaled MEMS-based ion traps. Such traps are being microfabricated and packaged at Sandias MESA facility in a unique tungsten MEMS process that has already made arrays of millions of micron-sized cylindrical ion traps for mass spectroscopy applications. We define and discuss the motivation for quantum simulation using the trapping of ions, show the results of efforts in designing, simulating, and microfabricating W based MEMS ion traps at Sandias MESA facility, and describe is some detail our development of a custom based ion trap chip packaging technology that enables the implementation of these devices in quantum physics experiments.
Global Conveyor Belts Market Professional Survey Report 2017 1 Industry Overview of Conveyor Belts 1.1 Definition and Specifications of Conveyor Belts 1.1.1 Definition of Conveyor Belts 1.1.2 Specifications of Conveyor Belts 1.2 Classification of Conveyor Belts 1.2.1 Lightweight Conveyor Belts 1.2.2 Medium-weight Conveyor Belts 1.2.3 Heavy-weight Conveyor Belts 1.3 Applications of Conveyor Belts 1.3.1 Mining 1.3.2 Manufacturing 1.3.3 Food Production Industry 1.3.4 Agriculture 1.3.5 Transport and logistics industry 1.3.6 Other 1.4 Market Segment by Regions 1.4.1 North America 1.4.2 China 1.4.3 Europe 1.4.4 Southeast Asia 1.4.5 Japan 1.4.6 India 2 Manufacturing Cost Structure Analysis of Conveyor Belts 2.1 Raw Material and Suppliers 2.2 Manufacturing Cost Structure Analysis of Conveyor Belts 2.3 Manufacturing Process Analysis of Conveyor Belts 2.4 Industry Chain Structure of Conveyor Belts 3 Technical Data and Manufacturing Plants Analysis of Conveyor Belts 3.1 Capacity and Commercial Production ...
This work proposes a new type of low-cost strain sensor, based on piezoresistive carbon nanotube (CNT) network deposited on a flexible substrate. Experimental results show that the strain can be reliably measured thanks to the highly linear piezoresistive behaviour of the CNT network and thanks to temperature compensation capabilities. Moreover, the experimental results show the capability of measuring multiple loading cycles. The performance and the range of sensitivity of the device, suggest possible usage in the domain of embedded monitoring, in particular the detection of micro-strain and micro-cracking in concrete. In order to target this domain, a wireless RFID solution to embed the sensor into concrete is provided.
This paper investigates the use of shape-memory polymer thin films in microelectromechanical systems (MEMS). shape-memory polymers possess the capacity to
Microelectromechanical system and nanoelectromechanical system (MEMS and NEMS) transistors are considered promising for size-reducing and power-maximizing electronic devices. However, the tribopolymer which forms due to the mechanical load to the contacts affects the conductivity dramatically. This is one of the challenging problems that prevents the widespread practical use of these otherwise promising devices. Here, we use density functional theory (DFT) to investigate the mechanisms of tribopolymer formation, including normal mechanical load and the catalytic effect, as well as the electrochemical effect of the metal contacts. We select benzene as the background gas, because it is one of the most common and severe hydrocarbon contaminants. Two adsorption cases are considered: one is benzene on the reactive metal surface, Pt(111), and the other is benzene on the noble metal, Au(111). We demonstrate that the formation of tribopolymer is induced by both the mechanical load and the catalytic effect of
 The first International Microelectromechanical Systems (MEMS)/Sensors Conference took place in Ho Chi Minh City on September 27.
The problem of unwanted residual polysilicon stringers along the sidewalls of a field oxide layer employed in direct moat wafer processing is avoided by a processing scheme in which the sidewalls of the aperture in the field oxide layer are initially tapered prior to formation of the polysilicon layer to be used for the gate electrode(s). Because of the graduated thickness of the sidewalls of the field oxide layer, the thickness of the polysilicon layer formed thereon is substantially uniform over the entirety of the substrate. As a result, during subsequent masking of the polysilicon layer to define the gate electrode(s), all unmasked portions of the polysilicon are completely etched, leaving no residual material (e.g. stringers) that could be a source of device contamination. After the polysilicon gate has been delineated, the sloped sidewalls of the field oxide are removed (by anisotropic etching), so that the sidewalls of the apertures or windows
This thesis aims to investigate the nonlinear size dependent behavior of electrically carbon nanotubes (CNTs) based nanoelectromechanical systems (NEMS) while including higher-order strain gradient deformations, the geometric nonlinearity due to the von Karman nonlinear strain as well as the slack (initial curvature) and temperature gradient effects. The assumed non-classical beam model adopts some internal material length scale parameters related to the material nanostructures and is capable of interpreting the size effect that the classical continuum beam model is unable to pronounce. The higher-order governing equations of motion and boundary conditions are derived using the so-called Hamilton principle. A Galerkin modal based reduced-order model (ROM) expansion is developed to prescribe the non-classical nanotube mode shape as well as its static behavior under any applied DC actuation voltage. Results of the static analysis is compared with those obtained by the classical elasticity ...
Microelectromechanical System (MEMS) Device, Method of Operating The Same, and Method of Forming the Same - A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed ...
This paper is the result of a masters thesis performed at Linköping University for Saab Bofors Dynamics in Linköping, Sweden.. Attitude is defined as the orientation of a coordinate frame in reference to another coordinate frame. This is often referred to as three consecutive rotations, called roll, pitch and yaw (or heading). Attitude determination is generally performed using inertial navigation systems composed of gyros and accelerometers. These systems are highly accurate but are very expensive and experience a drift when used for a long period of time.. The global positioning system, or GPS, was developed by the US military to determine a users position, velocity and time. These parameters can all be determined by performing measurements on the GPS satellite signal code that is modulated onto the GPS satellite signal carrier. But the GPS signal can also be use to determine attitude by performing carrier measurements for two or more GPS antennas. When determining the relative position ...
From the MEMS Technology Summit at Stanford University, here are the highlights from the second morning session on Tuesday October 19, 2010: Professor Thomas Kenny, Stanford University, Keynote: MEMS Goes Mainstream, but Where are We Going? What are we trying to do? Make money - others will cover that topic - and to enable capabilities.…
Only instrument of its type based on MEMS technology makes US debut Microsaic Systems plc, the high technology company developing next generation mass spectrometry instruments, will showcase its new revolutionary chip-based technology for the first time on booth #2255 at PITTCON 2013, from March 17 - 21, 2013 at the Pennsylvania Convention Center, Philadelphia. Microsaic Systems is the only producer of mass spectrometry instrumentation using Micro-Electrical-Mechanical Systems (MEMS) technology. The significant and innovative advances in the new chip-based instrument, the Microsaic 4000 MiD, offers a redesigned unit with an even smaller footprint...
Piezomechanik offer a comprehensive range of actuating elements, based on the piezoelectric effect, for positioning applications of the most exacting requirements. A number of single and multi-channel voltage amplifiers complete the line-up to provide a comprehensive package. In addition to standard devices, custom designed adjusters and OEM applications can be accommodated.. ...
Understanding and exploiting the fundamental properties of micro/nanomechanical structures and advanced nanomaterials to engineer new classes of micro and nanoelectromechanical systems (M/NEMS) with unique and enabling features applied to the areas of chemical, physical and biological sensing and low power reconfigurable radio communication ...
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost ...
Researchers with the U.S. Department of Energy (DOE)s Lawrence Berkeley National Laboratory and the University of California (UC) Berkeley have created the first nano-sized light mill motor whose rotational speed and direction can be controlled by tuning the frequency of the incident light waves. It may not help conquer the Dark Side, but this new light mill does open the door to a broad range of valuable applications, including a new generation of nanoelectromechanical systems (NEMS), nanoscale solar light harvesters, and bots that can perform in vivo manipulations of DNA and other biological molecules.. "We have demonstrated a plasmonic motor only 100 nanometers in size that when illuminated with linearly polarized light can generate a torque sufficient to drive a micrometre-sized silica disk 4,000 times larger in volume," says Xiang Zhang, a principal investigator with Berkeley Labs Materials Sciences Division and director of UC Berkeleys Nano-scale Science and Engineering Center (SINAM), ...